Semiconductor devices are at the core of our modern-day technology. Helping users in this dynamic industry to maintain a high level of quality in view of rapid technological advances, Anton Paar offers a range of solutions for characterizing semiconductor properties – from density and concentration measurements to surface charge analysis. Find the measuring instrument that meets your particular needs in the instrument list below – or let us help you find the best solution by contacting us directly.
Anton Paar Products
Automatic Chemisorption Analyzers: ChemBET Pulsar
Benchtop Raman spectrometers: Cora 7X00
Calotest Compact (CAT²c)
Compact Raman spectrometers: Cora 5X00
Density meter: DMA 4100 M
Density meter: DMA 4500 M
Density meter: DMA 5000 M
Digital Refractometer: Abbemat Performance
Domed Cooling Stage for Four-Circle Goniometers: DCS 500
Domed Hot Stage for Four-Circle Goniometers: DHS 1100
Dynamic shear rheometer measuring head: DSR 502
Electrokinetic Analyzer for Routine Solid Surface Analysis: SurPASS™ 3 Eco
Electrokinetic Analyzer: SurPASS
Foam testing Pycnometer: PentaFoam
Gas Pycnometer: PentaPyc
Gas sorption analyzer: autosorb IQ
Gas sorption analyzer: NOVAtouch
Gas sorption analyzer: QUADRASORB evo
Handheld density meter: DMA 35 Basic
Heavy Duty Refractometer: Abbemat Heavy Duty
High Pressure Digestion: HPA-S
High Temperature Ultra Nanoindentation (UNHT³ HTV)
High-Temperature Oven Chamber: HTK 1200N
Micro Scratch Tester: MST³
Microindentation Tester: MHT³
Microwave Digestion Rotor: 16HF100
Microwave Digestion Rotor: 16MF100
Microwave extraction rotor: 16SOLV HF100
Millikelvin Thermometers: MKT
Modular Compact Rheometer: MCR 102/302/502
Motorized alignment for XRD: z-alignment stage
Nano scratch tester: NST³
Nanoindentation tester: NHT³
Particle Size Analyzer: Litesizer 100
Particle Size Analyzer: Litesizer 500
Pin-on-disk tribometer: TRB³
Portable density meter: DMA 35
Reactor Chamber: XRK 900
Revetest® Scratch Tester: RST³
Sample changer: Xsample 530
Software for particle analysis: Kalliope™
Surface Area Analyzer: AutoFlow BET+
Ultra nanoindentation tester: UNHT³
Vacuum and Flow Degasser: FloVac
Vacuum Degasser: XeriPrep
Vacuum Tribometer: VTHT / VTRB
Anton Paar Applications
Improve Digestion Quality and Save Money – Microwave Digestion rules out Open Digestion
Reliable elemental analysis results need robust sample preparation to destroy sample matrices or to separate matrix from analytes. The sample preparation step is by far the most error-prone and critical step of the analytical procedure.
Can I Monitor the Composition of my Pickling Bath?
Relevant for steel, aluminium, semiconductors, electronics
The influence of Surface Roughness on Instrumented Indentation Testing (IIT)
Nanoindentation and Nanoscratch of Oxide Coatings on Thin Film Polymer Substrates
Mechanical properties of ultrananocrystalline diamond (UNCD) films with an influence of the nucleation density on the structure
Nanoindentation approach to mechanical testing of extremely soft materials
Nanotribological properties of Diamond like carbon thin flexible films on ACM rubber
Physical characterization of coated surfaces - Part II : Scratch Test
The Ultra Nanoindentation Tester: New generation of thermal drift free indentation
Gold nanoparticles: Size matters, and so does stability
Gold nanoparticles are now used in many fields, from medicine to electronics, but each application has specific particle-size and stability requirements. Gold nanoparticles can be easily monitored with the Litesizer™ 500.
Identifying three different particle sizes in one sample with DLS
Particle suspensions often contain more than one size of particle. However, many particle analyzers cannot resolve particle mixtures, instead they detect an average of all sizes. The Litesizer™ 500 can detect three sizes in one sample.
Temperature-dependent GISAXS studies on thin films
The temperature-induced decomposition of a thin film structure has been studied using the SAXSpoint system with the new temperature-controlled GISAXS stage.
Collagen - A Validation Sample for SAXS Systems
The performance of the SAXSpoint 2.0 system is evaluated by measurements of tendon collagen. SAXSpoint 2.0 produces data with excellent resolution in the entire angular range and delivers true 2D SWAXS images.
Detection of Native Oxide on Silicon Nitride Wafers
The zeta potential is a very sensitive parameter to detect traces of impurities on solid surfaces and their removal during surface cleaning.
SAXSpoint with MetalJet Source
SAXSpoint now integrates the high-brightness MetalJet X-ray source enabling ultra-fast SAXS measurements in the laboratory.
Chemical Mechanical Polishing / Planarization: Slurry Measurements
Relevant for the semiconductor industry
Industrial Waste Water Recycling and Treatment in the Semiconductor Industry
Relevant for the Semiconductor Industry
In-situ GISAXS heating experiments on self-assembled Gold nanoparticles
Thermal morphology changes of self-assembled Gold nanoparticles have been studied using the SAXSpoint system with the temperature controlled GISAXS stage.
Size and shape of gold nanoparticles in toluene via SAXS
A solution of colloidal gold nanoparticles was characterized for size and shape by the SAXSpace system.