Semiconductor devices are at the core of our modern-day technology. Helping users in this dynamic industry to maintain a high level of quality in view of rapid technological advances, Anton Paar offers a range of solutions for characterizing semiconductor properties – from density and concentration measurements to surface charge analysis. Find the measuring instrument that meets your particular needs in the instrument list below – or let us help you find the best solution by contacting us directly.
Anton Paar Products
Automated Multipurpose Powder X-Ray Diffractometer: XRDynamic 500
Combined density and sound velocity sensor: L-Com 5500
Density meter: DMA 4200 M
Digital performance refractometer: Abbemat
Electrokinetic analyzer for solid surface analysis: SurPASS 3
Inline density meter: L‑Dens 7000 series
Microwave digestion platform: Multiwave 5000
Microwave digestion system: Multiwave 7000
Nano scratch tester: NST³
Nanoindentation tester: NHT³
Particle size analyzer: Litesizer
Particle size analyzer: PSA
Rolling-ball viscometer: Lovis 2000 M/ME
SAXS/WAXS/GISAXS/RheoSAXS laboratory beamline: SAXSpoint 5.0
Single-station gas pycnometers for true density: Ultrapyc
Software solutions for ViscoQC: Software
Ultra nanoindentation tester: UNHT³
XRD software: XRDanalysis
Anton Paar Applications
Improve Digestion Quality and Save Money – Microwave Digestion rules out Open Digestion
Reliable elemental analysis results need robust sample preparation to destroy sample matrices or to separate matrix from analytes. The sample preparation step is by far the most error-prone and critical step of the analytical procedure.
Can I Monitor the Composition of my Pickling Bath?
Relevant for steel, aluminium, semiconductors, electronics
The influence of Surface Roughness on Instrumented Indentation Testing (IIT)
Nanoindentation and Nanoscratch of Oxide Coatings on Thin Film Polymer Substrates
Mechanical properties of ultrananocrystalline diamond (UNCD) films with an influence of the nucleation density on the structure
Nanoindentation approach to mechanical testing of extremely soft materials
Nanotribological properties of Diamond like carbon thin flexible films on ACM rubber
Physical characterization of coated surfaces - Part II : Scratch Test
The Ultra Nanoindentation Tester: New generation of thermal drift free indentation
Gold nanoparticles: Size matters, and so does stability
Gold nanoparticles are now used in many fields, from medicine to electronics, but each application has specific particle-size and stability requirements. Gold nanoparticles can be easily monitored with the Litesizer™ 500.
Identifying three different particle sizes in one sample with DLS
Particle suspensions often contain more than one size of particle. However, many particle analyzers cannot resolve particle mixtures, instead they detect an average of all sizes. The Litesizer™ 500 can detect three sizes in one sample.
Temperature-dependent GISAXS studies on thin films
The temperature-induced decomposition of a thin film structure has been studied using the SAXSpoint system with the new temperature-controlled GISAXS stage.
Collagen - A Validation Sample for SAXS Systems
The performance of the SAXSpoint 2.0 system is evaluated by measurements of tendon collagen. SAXSpoint 2.0 produces data with excellent resolution in the entire angular range and delivers true 2D SWAXS images.
Detection of Native Oxide on Silicon Nitride Wafers
The zeta potential is a very sensitive parameter to detect traces of impurities on solid surfaces and their removal during surface cleaning.
SAXSpoint with MetalJet Source
SAXSpoint now integrates the high-brightness MetalJet X-ray source enabling ultra-fast SAXS measurements in the laboratory.
Chemical Mechanical Polishing / Planarization: Slurry Measurements
Relevant for the semiconductor industry
Industrial Waste Water Recycling and Treatment in the Semiconductor Industry
Relevant for the Semiconductor Industry
In-situ GISAXS heating experiments on self-assembled Gold nanoparticles
Thermal morphology changes of self-assembled Gold nanoparticles have been studied using the SAXSpoint system with the temperature controlled GISAXS stage.
Size and shape of gold nanoparticles in toluene via SAXS
A solution of colloidal gold nanoparticles was characterized for size and shape by the SAXSpace system.