Temperature-dependent GISAXS Studies on Thin Films

The temperature-induced decomposition of a thin film structure has been studied using the SAXSpoint system with the new temperature-controlled GISAXS stage.


Thin film structures of various materials are currently studied widely because of their interesting properties relevant for research areas such as energy storage and conversion. Control of these interfacial structures is essential for the performance of such systems.

The final structures are supposed to be stable even at extreme conditions like at elevated temperatures. It is important to study the structure and possible structural (phase) changes in dependence of the temperature.

Grazing-incidence small-angle scattering (GISAXS) is a highly sensitive and time-saving analysis method for the characterization of such thin films. The new Heated Module for the GISAXS stage used in the Anton Paar SAXSpoint 2.0 system enables the user to perform such temperature-dependent GISAXS studies at temperatures of up to +500 °C in different atmospheres (vacuum, air or inert gas).

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