High Resolution Positioning Module:
Piezo Stage
- Exceptional repositioning accuracy
- High-precision indentation over large areas
- Seamless integration and easy platform upgrade
The Piezo stage delivers high-resolution indentation mapping of single-phase and composite materials over large areas – when accuracy matters most. Whether assessing individual phase properties, evaluating surface homogeneity, or studying thermomechanical effects, it ensures consistently accurate results. Combine it with Anton Paar’s UNHT³ head for industry-leading nanoindentation performance.
Key features
Piezo stage for exceptional repositioning accuracy
Achieve unmatched positional control with a 10nm repositioning accuracy, ensuring each indentation measurement is conducted at exactly the intended location.

High-precision indentation over large areas
The Piezo stage offers an extensive 100 μm × 100 μm measurement area, enabling you to carry out detailed large-area indentation mapping efficiently. This expanded capability provides precise mechanical characterization and consistent results across a significant surface area.

Seamless integration and easy platform upgrade
The Piezo stage can be easily integrated, either as an option when purchasing a new platform or as an upgrade to your existing instrument. This flexible approach allows you to enhance your measurement capabilities effortlessly, ensuring minimal downtime and immediate performance benefits.

Specifications
Specification | Value |
Travel range X | 100 μm |
Travel range Y | 100 μm |
Resolution XY | 0.2 nm |
Positioning accuracy XY | 10 nm |
Piezo stage dimensions | 100 x 100 x 20 mm |
Anton Paar Certified Service
- More than 350 manufacturer-certified technical experts worldwide
- Qualified support in your local language
- Protection for your investment throughout its lifecycle
- 3-year warranty