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High Temperature Ultra Nanoindentation (UNHT³ HTV)

  • Vacuum environment for better control of the heating and protection for indenter and sample against oxidation
  • Fully automatic procedure for minimizing thermal drift
  • Variable temperature testing from -150 °C to 800 °C
  • Vacuum levels down to 10-7 mbar
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The UNHT³ HTV high-temperature nanoindentation tester is a low-load nanomechanical test system for measuring the hardness and elastic modulus of thin films and coatings up to 800 °C. Patented UNHT technology combined with unique heating provides a high stability solution at any temperature.

Key features

The new generation of high-temperature nanoindentation tester

  • The lowest thermal drift at ambient conditions (< 0.5 nm/min) and over the entire temperature range (< 3 nm/min).
  • The highest load frame stiffness (>>106 N/m) and lowest frame compliance (<<0.1 nm/mN): Two independent depth and load sensors combined with high-resolution capacitive sensors for true depth and load control modes.
  • High vacuum system with 5-axis magnetically levitated turbopump and buffer system which allows switching off the primary pump during measurement so that pump vibration is minimized.
  • Unique heating management (3 patents pending) which incorporates 3 infrared (IR) heaters for the indenter, reference and sample and 4 thermocouples for controlling sample surface temperature to within 0.1°C.
  • Compliant with ISO 14577 and ASTM E2546

Technical specifications

Max. load 100 mN
Load resolution   6 nN
Noise floor   0.5 [rms] [μN]*
Max. depth100 μm
Depth resolution 0.003 nm
Noise floor 0.15 [rms] [nm]*
Ultimate vacuum 10 mBar
Maximum temperature 800 °C

*Noise floor value specified under ideal laboratory conditions and using an anti-vibration table.

Anton Paar Certified Service

The Anton Paar quality in service and support:
  • More than 350 manufacturer-certified technical experts worldwide
  • Qualified support in your local language
  • Protection for your investment throughout its lifecycle
  • 3-year warranty
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