How automated AFM and smart data processing can be used for quality management and statistical process control
Atomic force microscopy yields a 3D model of the investigated surface property within a small area. However, sometimes a single measurement is not enough. Automated AFM measurements and data processing can be a very useful tool to obtain statistically significant data. In this webinar, we will demonstrate the application of automated AFM (batch) measurements for Anton Paar's Tosca AFM, and the tools used for data analysis for fast data processing. We will discuss roughness analysis of silicon wafers for the semiconductor industry, evaluation of material composition of thin films for microelectronic devices by KPFM, and particle analysis of nano crystals grown on wafers to determine their lateral distribution.
Trainer: Dr. Martin Pfeiler-Deutschmann
Martin Pfeiler-Deutschmann works in the product competence team for nano surface properties at Anton Paar Graz. He has a material science background with focus on nanostructured materials and surface engineering. He received his PhD from the University of Leoben, Austria in 2009 working in various industries ever since. In 2019, he joined Anton Paar as specialist for atomic force microscopy. His main task is knowledge transfer for atomic force microscopy and the development of new applications for AFM for academia and industry.
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